Ion Implanter Ceramic Parts | Touch-Down Precision Ceramics
Touch-Down manufactures precision ion implanter ceramic parts with 0.0001-0.0003mm tolerance. High-purity alumina insulators, vacuum feedthroughs, and electrode components for semiconductor equipment.
Advanced Ceramic Component Series for Ion Implantation & Precision Handling. Applications: Ion Implantation, Optical Metrology, Chemical Vapor Deposition (CVD), and advanced packaging automated handling
Key Features:
*Precision Components for Ion Implanters: Specifically engineered for Ion Implantation systems, including high-voltage insulators, shielding rings, and electrode components. Fabricated from high-purity Alumina, these parts offer superior dielectric strength and resistance to ion bombardment for stable operation in intense electric fields.
* High-Dynamic Robot End Effectors: Features a diverse array of ceramic blades optimized for various wafer sizes. The lightweight, high-rigidity design enhances dynamic response during pick-and-place operations and minimizes end-of-arm vibrations.
* Integrated Vacuum Channel Systems: Utilizes precision etching for integrated vacuum suction channels. Surface flatness is held to micron-level tolerances, ensuring secure wafer handling while minimizing physical stress and damage to the wafer backside.
Exceptional Environmental Durability: Provides outstanding resistance to plasma erosion, corrosion, and thermal cycling. Our components minimize particle contamination and significantly extend parts' lifespan and Mean Time Between Maintenance (MTBM).
Located near the Science Park of Taiwan Hsinchu, the world-renowned science and technology town, our plant enjoys more than 25 years of professional production and processing experience in alumina, zirconia, silicon nitride, silicon carbide ceramic production and processing. We boast strong technical force, refined equipment and rich processing experience. Now we have several precision CNC equipment, precision machine tools, and a variety of leading processing technology and processing tools as well as sophisticated detection equipment to ensure product quality and precision. We are able to produce precision ceramic parts of a variety of specifications, types according to customer drawings. Our products feature high precision, good performance and are widely used in semiconductor, photovoltaic, precision machinery, military, medical, scientific research and other field.
Processing Object
Semiconductor process equipment Implanter ceramic parts.
Type
Implanter ceramic parts.
Main Features
Touch-Down boasts a group of excellent engineers and enjoys a unique high-profile technology in the special-shaped ceramic processing projects. Special-shaped processing technology is the strengths of Touch-Down.
Production Process
Semiconductor Ceramic Parts, Ion Implanter Ceramics, Alumina Insulator Blocks, Electrode Shielding, High-Voltage Ceramic Posts, Fab Maintenance Parts.
The Main Products
Ceramic Bolt, Ceramic Shaft, Zirconia Ceramic, Plug Gauge, Ring Gauge, Alumina Ceramic Arm, Ceramic Disc, Ceramic Ring, Microporous Ceramic Vacuum Chuck, Substrate, Ceramic, Ceramic Rails, Special-Shaped Pieces and so on. Semiconductor Ceramics, Ion Implanter Parts, Alumina Insulators, Precision Ceramic Machining, Ion Source Base, Vacuum Feedthroughs.
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Semiconductor Process Equipment Implanter Ceramic Parts
Semiconductor Process Equipment Implanter Ceramic Parts
High-Purity Ceramic Guide Frame / Insulating Locator. Manufactured from >99.7% high-purity Alumina (Al2O3), this component is designed for high-stability requirements within semiconductor vacuum chambers. It features exceptional dimensional stability and plasma resistance. The precision-drilled corner holes ensure accurate alignment during installation, while the oval aperture is optimized to minimize interference with ion beams or process gas flow.
Semiconductor Process Equipment Implanter Ceramic Parts
Ion Source High-Voltage Insulator Post. Applications: Replacement parts for leading Ion Implanter brands, including AMAT (Applied Materials) and Axcelis systems.
Composite Ceramic Insulator Sleeves for Ion Implanters.(Stepped Ceramic Insulator / Electrode Shield) Applications: Ion source shielding, acceleration electrode support, and high-voltage feedthrough protection.
Precision Multi-Port Ceramic Mounting Base for Ion Implanters.Ion Source Precision Alignment & Insulating Block.Applications: Support for Ion Source modules, filament electrode positioning, and high-voltage barriers in Ion Implantation systems.
Nested Precision Ceramic Insulator Set for Ion Implanters.(Modular Ion Source Insulator / Electrode Bushing.)Specifically designed for use in the Ion Source chambers of High and Medium Current Ion Implantation systems.
Multi-Vane High-Voltage Ceramic Insulator for Ion Implanters.(Vane-type Electrode Support Insulator) Support for acceleration electrodes in ion implanters, high-voltage power isolation, and in-chamber HV feedthrough protection.
Semiconductor Process Equipment Implanter Ceramic Parts
High-Purity Alumina Dual-Port Insulating Flanges for Ion Implanters(Dual-Port Ceramic Insulator / Vacuum Feedthrough Base)Base diameter approx. 50mm; pillar height approx. 20-30mm (depending on specific P/N).
Semiconductor Process Equipment Implanter Ceramic Parts
Semiconductor Process Equipment Implanter Ceramic Parts
Semiconductor Process Equipment Implanter Ceramic Parts
Semiconductor Process Equipment Implanter Ceramic Parts
Semiconductor Process Equipment Implanter Ceramic Parts
Large-Scale High-Precision Multi-Hole Ceramic Base Plate.(Precision Ceramic Electrode Carrier / Vacuum Chamber Support Plate) Vacuum chambers for ion implanters, support bases for PVD/CVD showerheads, and high-voltage electrode backplates.
Semiconductor Process Equipment Implanter Ceramic Parts
High-Precision Ceramic Consumables for Ion Implantation.Semiconductor Ceramics, Ion Implanter Parts, Alumina Insulators, Precision Ceramic Machining, Ion Source Base, Vacuum Feedthroughs.
Semiconductor Process Equipment Implanter Ceramic Parts
Semiconductor Process Equipment Implanter Ceramic Parts
Semiconductor Process Equipment Implanter Ceramic Parts
High-End Precision Ceramics for Ion Implanters.
Semiconductor Process Equipment Implanter Ceramic Parts
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Precision Ceramics
Touch-Down - Most accurate and professional long-term partner. Welcome to trial and proofing.
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How can you ensure your ion implanter systems maintain stable operation under intense electric fields while minimizing maintenance downtime?
Touch-Down's high-purity alumina insulators and electrode components are specifically engineered to withstand ion bombardment and intense electric fields, providing exceptional dielectric strength and outstanding resistance to plasma erosion. Our 0.0001-0.0003mm tolerance precision manufacturing ensures reliable performance and significantly extends Mean Time Between Maintenance (MTBM), reducing your equipment downtime and operational costs.
Leveraging 29 years of professional manufacturing expertise and our location near Taiwan's Hsinchu Science Park, Touch-Down combines advanced precision CNC equipment, sophisticated detection systems, and refined processing technology to deliver custom ceramic solutions tailored to your specific requirements. Our high-dynamic robot end effectors feature diverse ceramic blade arrays optimized for various wafer sizes, offering lightweight, high-rigidity designs that enhance dynamic response during pick-and-place operations while minimizing end-of-arm vibrations. With ISO 9001:2008 certification and one-step production capability, we ensure strict quality control and consistent performance across semiconductor, photovoltaic, and precision machinery applications. Contact our engineering team today to discuss how Touch-Down's precision ceramic components can optimize your semiconductor process equipment performance and reliability.