Precision Ceramic Parts for Semiconductor Process Equipment

Large-scale chamber shields and precision ceramic handling components engineered for 300mm wafer processing systems with exceptional accuracy and temperature resistance

Precision Ceramic Parts of Semiconductor Process Equipment - This is a set of high purity alumina ceramic parts.
  • Precision Ceramic Parts of Semiconductor Process Equipment - This is a set of high purity alumina ceramic parts.
  • Large-Scale Precision Ceramic Shield Ring for 300mm(12-inch) Wafer Chambers. Applications: Plasma Dry Etching systems, CVD/PVD deposition chambers, Ion Implanters, and internal shielding for high-temperature diffusion furnaces.
  • Large-Scale Precision Ceramic Showerhead Base / Gas Distributor. Applications:Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), Plasma Etching systems, and advanced gas delivery modules.
  • Semiconductor Process Core Components: Large-Scale Showerheads & Advanced Handling Blades. Applications: 300mm(12-inch) wafer processing equipment (ALD/CVD/Etch), optical metrology platforms, vacuum transfer environments, and Rapid Thermal Processing (RTP).

Precision Ceramic Parts of Semiconductor Process Equipment

Large-Scale Chamber Shields & Precision Ceramic Handling Components. Touch-Down boasts a group of excellent engineers and enjoys a unique high-profile technology in the special-shaped ceramic processing projects. Special-shaped processing technology is the strengths of Touch-Down.

Touch-Down produced precision ceramic parts feature good structural strength, high temperature resistance, high pressure resistance, good accuracy, good parallelism, high density and uniform organization. For many years, it has been used by the semiconductor manufacturing plant.

This demonstrates our exceptional CNC capabilities in executing complex geometric cuts and maintaining tight tolerances on large, ultra-hard ceramic bodies. Applications:Plasma Dry Etching systems, CVD/PVD chamber internal shielding, High-temperature diffusion furnaces, and 300mm automated wafer handling systems.

Processing Object

Capability to produce large-format ceramic components ranging from 250mm to 550mm, fully supporting 300mm (12-inch) wafer processing and advanced packaging tools.

Type

Ceramic ring ceramic parts.

Main Features

Touch-Down produced precision ceramic parts feature good structural strength, high temperature resistance, high pressure resistance, good accuracy, good parallelism, high density and uniform organization.

The Main Products

Ceramic Bolt, Ceramic Shaft, Zirconia Ceramic, Plug Gauge, Ring Gauge, Alumina Ceramic Arm, Ceramic Disc, Ceramic Ring, Microporous Ceramic Vacuum Chuck, Substrate, Ceramic, Ceramic Rails, Special-Shaped Pieces and so on.

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Precision Ceramics

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How can you ensure your plasma dry etching and CVD/PVD systems maintain consistent performance with precision ceramic chamber shields?

Touch-Down's precision ceramic chamber shields are engineered to withstand extreme temperatures and pressures while maintaining exceptional accuracy and parallelism. Our 29 years of manufacturing expertise combined with ISO 9001 certification ensures your semiconductor equipment operates at peak efficiency. We deliver large-format components (250-550mm) supporting full 300mm wafer processing with custom engineering capabilities tailored to your specific equipment requirements. Contact our team to explore how our precision ceramic solutions can optimize your process reliability.

Our ceramic semiconductor components—including ceramic bolts, shafts, zirconia ceramic parts, plug gauges, ring gauges, alumina ceramic arms, ceramic discs, rings, microporous ceramic vacuum chucks, and custom special-shaped pieces—demonstrate our exceptional CNC capabilities in executing complex geometric cuts on large, ultra-hard ceramic bodies. Each component undergoes rigorous quality control to ensure good accuracy and uniform organization, meeting the demanding specifications required by semiconductor manufacturing plants worldwide. Contact Touch-Down today to discuss how our precision ceramic solutions can enhance your semiconductor processing equipment performance and reliability.